Microbeam analysis - Analytical electron microscopy - Calibration procedure of energy scale for elemental analysis by electron energy loss spectroscopy
This document specifies a calibration procedure of the energy step and the energy scale for electron energy loss spectroscopy in (scanning) transmission electron microscopes to an uncertainty of ±3 % for the energy range 0 eV to 3 000 eV.
This document is intended for electron energy loss spectroscopy with transmitted electrons through sufficiently electron transparent samples, such as a thin foil sample, and is not designed for backscattered electrons from a bulk sample.
| SDO | ISO: International Organization for Standardization |
| Document Number | ISO 24639 |
| Publication Date | Not Available |
| Language | en - English |
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| Committee | ISO/TC 202/SC 3 |