Carbon based films - Determination of optical properties of amorphous carbon films by spectroscopic ellipsometry
This document specifies spectroscopic ellipsometry for the determination of optical properties (refractive index n and extinction coefficient k) and the optical classification of different types of amorphous carbon films within the n-k plane.
It is applicable to amorphous carbon films deposited by ionized evaporation, sputtering, arc deposition, plasma-assisted chemical vapour deposition, hot filament techniques and others.
It does not apply to carbon films modified with metals or silicon, amorphous carbon films that have a gradient of composition/property in the thickness, paints and varnishes.
| SDO | ISO: International Organization for Standardization |
| Document Number | ISO 23216 |
| Publication Date | Not Available |
| Language | en - English |
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| Committee | ISO/TC 107 |