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ISO 22278:2020

Fine ceramics (advanced ceramics, advanced technical ceramics) - Test method for crystalline quality of single-crystal thin film (wafer) using XRD method with parallel X-ray beam
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ISO 22278:2020

Fine ceramics (advanced ceramics, advanced technical ceramics) - Test method for crystalline quality of single-crystal thin film (wafer) using XRD method with parallel X-ray beam

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This document specifies the test method for measuring the crystalline quality of single-crystal thin film (wafer) using the XRD method with parallel X-ray beam. This document is applicable to all of the single-crystal thin film (wafer) as bulk or epitaxial layer structure.

SDO ISO: International Organization for Standardization
Document Number ISO 22278
Publication Date Not Available
Language en - English
Page Count
Revision Level
Supercedes
Committee ISO/TC 206
Publish Date Document Id Type View
Not Available ISO 22278:2020 Revision