Logo
Login Sign Up
Current Revision

ISO 20341:2003

Surface chemical analysis - Secondary-ion mass spectrometry - Method for estimating depth resolution parameters with multiple delta-layer reference materials
Best Price Guarantee
Instant

$54.00

2-5 Days

$54.00

SAVE 15%

$91.80


Sub Total (1 Item(s))

$ 0.00

Estimated Shipping

$ 0.00

Total (Pre-Tax)

$ 0.00


or
International Organization for Standardization Logo

ISO 20341:2003

Surface chemical analysis - Secondary-ion mass spectrometry - Method for estimating depth resolution parameters with multiple delta-layer reference materials

Document Preview

ISO 20341:2003 specifies procedures for estimating three depth resolution parameters, viz the leading-edge decay length, the trailing-edge decay length and the Gaussian broadening, in SIMS depth profiling using multiple delta-layer reference materials.

It is not applicable to delta-layers where the chemical and physical state of the near-surface region, modified by the incident primary ions, is not in the steady state.

SDO ISO: International Organization for Standardization
Document Number ISO 20341
Publication Date Not Available
Language en - English
Page Count
Revision Level
Supercedes
Committee ISO/TC 201/SC 6
Publish Date Document Id Type View
Not Available ISO 20341:2003 Revision