Surface chemical analysis - Fundamental approaches to determination of lateral resolution and sharpness in beam-based methods
ISO/TR 19319:2013 describes: functions and their relevance to lateral resolution: point spread function (PSF), line spread function (LSF), edge spread function (ESF), modulation transfer function (MTF) and contrast transfer function (CTF); experimental methods for the determination of lateral resolution and parameters related to lateral resolution: imaging of a narrow stripe, sharp edge and square-wave gratings; physical factors affecting lateral resolution, analysis area and sample area viewed by the analyser in Auger electron spectroscopy and X-ray photoelectron spectroscopy.
| SDO | ISO: International Organization for Standardization |
| Document Number | ISO/TR 19319 |
| Publication Date | Not Available |
| Language | en - English |
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| Supercedes | |
| Committee | ISO/TC 201/SC 2 |