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BSI PD ISO/TR 19319:2013

Current Revision

Surface chemical analysis. Fundamental approaches to determination of lateral resolution and sharpness in beam-based methods

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resolution and sharpness in beam-based methods

SDO BSI: British Standards Institution
Document Number PD ISO/TR 19319
Publication Date March 31, 2013
Language en - English
Page Count 126
Revision Level
Supercedes
Committee
Publish Date Document Id Type View
March 31, 2013 PD ISO/TR 19319:2013 Revision
April 5, 2005 PD ISO/TR 19319:2003 Revision