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BSI BS ISO 23216:2021

Carbon based films. Determination of optical properties of amorphous carbon films by spectroscopic ellipsometry
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BSI BS ISO 23216:2021

Carbon based films. Determination of optical properties of amorphous carbon films by spectroscopic ellipsometry

PUBLISH DATE 2021
PAGES 16
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Amorphous carbon films by spectroscopic ellipsometry
SDO BSI: British Standards Institution
Document Number BS ISO 23216
Publication Date May 7, 2021
Language en - English
Page Count 16
Revision Level
Supercedes
Committee
Publish Date Document Id Type View
May 7, 2021 BS ISO 23216:2021 Revision