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BSI BS ISO 22278:2020

Fine ceramics (advanced ceramics, advanced technical ceramics). Test method for crystalline quality of single-crystal thin film (wafer) using XRD method with parallel X-ray beam
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BSI BS ISO 22278:2020

Fine ceramics (advanced ceramics, advanced technical ceramics). Test method for crystalline quality of single-crystal thin film (wafer) using XRD method with parallel X-ray beam

PUBLISH DATE 2020
PAGES 38
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Single-crystal thin film (wafer) using XRD method with parallel X-ray beam
SDO BSI: British Standards Institution
Document Number BS ISO 22278
Publication Date Aug. 26, 2020
Language en - English
Page Count 38
Revision Level
Supercedes
Committee
Publish Date Document Id Type View
Aug. 26, 2020 BS ISO 22278:2020 Revision