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BSI BS ISO 21859:2019

Fine ceramics (advanced ceramics, advanced technical ceramics). Test method for plasma resistance of ceramic components in semiconductor manufacturing equipment
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BSI BS ISO 21859:2019

Fine ceramics (advanced ceramics, advanced technical ceramics). Test method for plasma resistance of ceramic components in semiconductor manufacturing equipment

PUBLISH DATE 2019
PAGES 10
Document Preview
Test method for plasma resistance of ceramic components in semiconductor manufacturing equipment
SDO BSI: British Standards Institution
Document Number BS ISO 21859
Publication Date June 19, 2019
Language en - English
Page Count 10
Revision Level
Supercedes
Committee
Publish Date Document Id Type View
June 19, 2019 BS ISO 21859:2019 Revision