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BSI BS ISO 16413:2020

Evaluation of thickness, density and interface width of thin films by X-ray reflectometry. Instrumental requirements, alignment and positioning, data collection, data analysis and reporting
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BSI BS ISO 16413:2020

Evaluation of thickness, density and interface width of thin films by X-ray reflectometry. Instrumental requirements, alignment and positioning, data collection, data analysis and reporting

PUBLISH DATE 2020
PAGES 42
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Alignment and positioning, data collection, data analysis and reporting
SDO BSI: British Standards Institution
Document Number BS ISO 16413
Publication Date Aug. 18, 2020
Language en - English
Page Count 42
Revision Level
Supercedes
Committee
Publish Date Document Id Type View
Aug. 18, 2020 BS ISO 16413:2020 Revision
March 31, 2013 BS ISO 16413:2013 Revision