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BSI BS ISO 13083:2015

Surface chemical analysis. Scanning probe microscopy. Standards on the definition and calibration of spatial resolution of electrical scanning probe microscopes (ESPMs) such as SSRM and SCM for 2D-dopant imaging and other purposes
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BSI BS ISO 13083:2015

Surface chemical analysis. Scanning probe microscopy. Standards on the definition and calibration of spatial resolution of electrical scanning probe microscopes (ESPMs) such as SSRM and SCM for 2D-dopant imaging and other purposes

PUBLISH DATE 2015
PAGES 26
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calibration of spatial resolution of electrical scanning pro
SDO BSI: British Standards Institution
Document Number BS ISO 13083
Publication Date Aug. 31, 2015
Language en - English
Page Count 26
Revision Level
Supercedes
Committee
Publish Date Document Id Type View
Aug. 31, 2015 BS ISO 13083:2015 Revision