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BSI BS EN 62047-6:2010

Semiconductor devices. Micro-electromechanical devices. Axial fatigue testing methods of thin film materials
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BSI BS EN 62047-6:2010

Semiconductor devices. Micro-electromechanical devices. Axial fatigue testing methods of thin film materials

PUBLISH DATE 2010
PAGES 20
BSI BS EN 62047-6:2010
Part 6: Axial fatigue testing methods of thin film materials
SDO BSI: British Standards Institution
Document Number BS EN 62047-6
Publication Date April 30, 2010
Language en - English
Page Count 20
Revision Level
Supercedes
Committee
Publish Date Document Id Type View
April 30, 2010 BS EN 62047-6:2010 Revision