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BSI BS EN 62047-25:2016

Semiconductor devices. Micro-electromechanical devices. Silicon based MEMS fabrication technology. Measurement method of pull-press and shearing strength of micro bonding area
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BSI BS EN 62047-25:2016

Semiconductor devices. Micro-electromechanical devices. Silicon based MEMS fabrication technology. Measurement method of pull-press and shearing strength of micro bonding area

PUBLISH DATE 2016
PAGES 28
BSI BS EN 62047-25:2016
Measurement method of pull-press and shearing strength of mi
SDO BSI: British Standards Institution
Document Number BS EN 62047-25
Publication Date Nov. 30, 2016
Language en - English
Page Count 28
Revision Level
Supercedes
Committee
Publish Date Document Id Type View
Nov. 30, 2016 BS EN 62047-25:2016 Revision