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BSI BS EN 62047-2:2006

Semiconductor devices. Micro-electromechanical devices. Tensile testing method of thin film materials
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BSI BS EN 62047-2:2006

Semiconductor devices. Micro-electromechanical devices. Tensile testing method of thin film materials

PUBLISH DATE 2006
PAGES 16
Document Preview
FILM MATERIALS
SDO BSI: British Standards Institution
Document Number BS EN 62047-2
Publication Date Nov. 30, 2006
Language en - English
Page Count 16
Revision Level
Supercedes
Committee
Publish Date Document Id Type View
Nov. 30, 2006 BS EN 62047-2:2006 Revision