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BSI BS EN 62047-12:2011

Semiconductor devices. Micro-electromechanical devices. Bending fatigue testing method of thin film materials using resonant vibration of MEMS structures
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BSI BS EN 62047-12:2011

Semiconductor devices. Micro-electromechanical devices. Bending fatigue testing method of thin film materials using resonant vibration of MEMS structures

PUBLISH DATE 2011
PAGES 34
BSI BS EN 62047-12:2011
of thin film materials using resonant vibration of MEMS stru
SDO BSI: British Standards Institution
Document Number BS EN 62047-12
Publication Date Nov. 30, 2011
Language en - English
Page Count 34
Revision Level
Supercedes
Committee
Publish Date Document Id Type View
Nov. 30, 2011 BS EN 62047-12:2011 Revision