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ASTM F388-84

Method for Measurement of Oxide Thickness on Silicon Wafers and Metallization Thickness by Multiple-Beam Interference (Tolansky Method) (Withdrawn 1993)
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SDO ASTM: ASTM International
Document Number F388
Publication Date Not Available
Language en - English
Page Count 6
Revision Level 84
Supercedes
Committee F01.06
Publish Date Document Id Type View
Not Available F0388-84 Revision